Tantalum carbide coated susceptor support plate is a susceptor or support structure that is covered with a thin layer of tantalum carbide. This coating can be formed on the susceptor surface by techniques such as physical vapor deposition (PVD) or chemical vapor deposition (CVD), giving the susceptor the superior properties of tantalum carbide.
Semicera provides specialized tantalum carbide (TaC) coatings for various components and carriers. Semicera leading coating process enables tantalum carbide (TaC) coatings to achieve high purity, high temperature stability and high chemical tolerance, improving product quality of SIC/GAN crystals and EPI layers (Graphite coated TaC susceptor), and extending the life of key reactor components. The use of tantalum carbide TaC coating is to solve the edge problem and improve the quality of crystal growth, and Semicera has breakthrough solved the tantalum carbide coating technology (CVD), reaching the international advanced level.
After years of development, Semicera has conquered the technology of CVD TaC with the joint efforts of the R&D department. Defects are easy to occur in the growth process of SiC wafers, but after using TaC, the difference is significant. Below is a comparison of wafers with and without TaC, as well as Simicera' parts for single crystal growth.
The main features of tantalum carbide coated base support plates include:
1. High temperature stability: Tantalum carbide has excellent high temperature stability, making the coated base support plate suitable for support needs in high temperature working environments.
2. Corrosion resistance: Tantalum carbide coating has good corrosion resistance, can resist chemical corrosion and oxidation, and extend the service life of the base.
3. High hardness and wear resistance: The high hardness of tantalum carbide coating gives the base support plate good wear resistance, which is suitable for occasions requiring high wear resistance.
4. Chemical stability: Tantalum carbide has high stability to a variety of chemical substances, making the coated base support plate perform well in some corrosive environments.
with and without TaC
After using TaC (right)
Moreover, Semicera's TaC-coated products exhibit a longer service life and greater high-temperature resistance compared to SiC coatings. Laboratory measurements have demonstrated that our TaC coatings can consistently perform at temperatures up to 2300 degrees Celsius for extended periods. Below are some examples of our samples:
