TaC Coated Plate is a specialized disc designed for use in SiC epitaxial processes, crafted with precision from high-quality graphite material. Its surface is meticulously coated with tantalum carbide (TaC), a compound known for its exceptional purity and strength. The TaC coating enhances the plate's durability and resistance to high temperatures, making it ideal for the demanding conditions of SiC epitaxial processes.
This innovative TaC Coated Plate is a specialized disc designed for use in SiC epitaxial processes, crafted with precision from high-quality graphite material. TaC Coated Plate surface is meticulously coated with tantalum carbide (TaC), a compound known for its exceptional purity and strength. serves as a reliable platform for carrying wafers during various stages of SiC epitaxial growth. Its high-purity graphite base provides a stable and inert surface, while the TaC coating adds an extra layer of protection against chemical reactions and wear.
Semicera TaC Coated Plate is customized according to the specific requirements of the customers, ensuring optimal performance and compatibility with their SiC epitaxial systems. Whether it's size, shape, or other specifications, these plates are tailored to meet the unique needs of every application.
with and without TaC
After using TaC (right)
Moreover, Semicera's TaC-coated products exhibit a longer service life and greater high-temperature resistance compared to SiC coatings. Laboratory measurements have demonstrated that our TaC coatings can consistently perform at temperatures up to 2300 degrees Celsius for extended periods. Below are some examples of our samples:
