TaC coated graphite guide rings refer to the deposition of a thin layer of tantalum carbide on the surface of a graphite guide ring to improve its wear resistance, high temperature resistance and chemical stability. This coating is usually formed on the surface of a graphite guide ring by techniques such as physical vapor deposition (PVD) or chemical vapor deposition (CVD).
Semicera provides specialized tantalum carbide (TaC) coatings for various components and carriers. Semicera leading coating process enables tantalum carbide (TaC) coatings to achieve high purity, high temperature stability and high chemical tolerance, improving product quality of SIC/GAN crystals and EPI layers (Graphite coated TaC susceptor), and extending the life of key reactor components. The use of tantalum carbide TaC coating is to solve the edge problem and improve the quality of crystal growth, and Semicera has breakthrough solved the tantalum carbide coating technology (CVD), reaching the international advanced level.
After years of development, Semicera has conquered the technology of CVD TaC with the joint efforts of the R&D department. Defects are easy to occur in the growth process of SiC wafers, but after using TaC, the difference is significant. Below is a comparison of wafers with and without TaC, as well as Simicera' parts for single crystal growth.
The main features of TaC coated graphite guide rings include:
1. High temperature resistance: TaC coating has excellent high temperature stability and can maintain stability in high temperature environments.
2. Wear resistance: The high hardness of the tantalum carbide thin layer gives the guide ring good wear resistance and extends its service life.
3. Chemical stability: TaC coating has high stability against chemical corrosion, making it suitable for applications in some corrosive media.
4. Reduce friction: TaC coating can effectively reduce the friction between the graphite guide ring and other components and improve the efficiency of mechanical seals.
with and without TaC
After using TaC (right)
Moreover, Semicera's TaC-coated products exhibit a longer service life and greater high-temperature resistance compared to SiC coatings. Laboratory measurements have demonstrated that our TaC coatings can consistently perform at temperatures up to 2300 degrees Celsius for extended periods. Below are some examples of our samples:
