Silicon On Insulator Wafer

Short Description:

Semicera’s Silicon On Insulator (SOI) Wafer provides exceptional electrical isolation and thermal management for high-performance applications. Engineered to deliver superior device efficiency and reliability, these wafers are a prime choice for advanced semiconductor technology. Choose Semicera for cutting-edge SOI wafer solutions.


Product Detail

Product Tags

Semicera’s Silicon On Insulator (SOI) Wafer is at the forefront of semiconductor innovation, offering enhanced electrical isolation and superior thermal performance. The SOI structure, consisting of a thin silicon layer on an insulating substrate, provides critical benefits for high-performance electronic devices.

Our SOI wafers are designed to minimize parasitic capacitance and leakage currents, which is essential for developing high-speed and low-power integrated circuits. This advanced technology ensures that devices operate more efficiently, with improved speed and reduced energy consumption, crucial for modern electronics.

The advanced manufacturing processes employed by Semicera guarantee the production of SOI wafers with excellent uniformity and consistency. This quality is vital for applications in telecommunications, automotive, and consumer electronics, where reliable and high-performing components are required.

In addition to their electrical benefits, Semicera’s SOI wafers offer superior thermal insulation, enhancing heat dissipation and stability in high-density and high-power devices. This feature is particularly valuable in applications that involve significant heat generation and require effective thermal management.

By choosing Semicera’s Silicon On Insulator Wafer, you invest in a product that supports the advancement of cutting-edge technologies. Our commitment to quality and innovation ensures that our SOI wafers meet the rigorous demands of today’s semiconductor industry, providing the foundation for next-generation electronic devices.

Items

Production

Research

Dummy

Crystal Parameters

Polytype

4H

Surface orientation error

<11-20 >4±0.15°

Electrical Parameters

Dopant

n-type Nitrogen

Resistivity

0.015-0.025ohm·cm

Mechanical Parameters

Diameter

150.0±0.2mm

Thickness

350±25 μm

Primary flat orientation

[1-100]±5°

Primary flat length

47.5±1.5mm

Secondary flat

None

TTV

≤5 μm

≤10 μm

≤15 μm

LTV

≤3 μm(5mm*5mm)

≤5 μm(5mm*5mm)

≤10 μm(5mm*5mm)

Bow

-15μm ~ 15μm

-35μm ~ 35μm

-45μm ~ 45μm

Warp

≤35 μm

≤45 μm

≤55 μm

Front(Si-face) roughness(AFM)

Ra≤0.2nm (5μm*5μm)

Structure

Micropipe density

<1 ea/cm2

<10 ea/cm2

<15 ea/cm2

Metal impurities

≤5E10atoms/cm2

NA

BPD

≤1500 ea/cm2

≤3000 ea/cm2

NA

TSD

≤500 ea/cm2

≤1000 ea/cm2

NA

Front Quality

Front

Si

Surface finish

Si-face CMP

Particles

≤60ea/wafer (size≥0.3μm)

NA

Scratches

≤5ea/mm. Cumulative length ≤Diameter

Cumulative length≤2*Diameter

NA

Orange peel/pits/stains/striations/ cracks/contamination

None

NA

Edge chips/indents/fracture/hex plates

None

Polytype areas

None

Cumulative area≤20%

Cumulative area≤30%

Front laser marking

None

Back Quality

Back finish

C-face CMP

Scratches

≤5ea/mm,Cumulative length≤2*Diameter

NA

Back defects (edge chips/indents)

None

Back roughness

Ra≤0.2nm (5μm*5μm)

Back laser marking

1 mm (from top edge)

Edge

Edge

Chamfer

Packaging

Packaging

Epi-ready with vacuum packaging

Multi-wafer cassette packaging

*Notes: "NA" means no request Items not mentioned may refer to SEMI-STD.

tech_1_2_size
SiC wafers

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