Product Overview
The Silicon-Impregnated Silicon Carbide (SiC) Paddle and Wafer Carrier is engineered to meet the demanding requirements of semiconductor thermal processing applications. Crafted from high-purity SiC and enhanced through silicon impregnation, this product offers a unique combination of high-temperature performance, excellent thermal conductivity, corrosion resistance, and outstanding mechanical strength.
By integrating advanced material science with precision manufacturing, this solution ensures superior performance, reliability, and durability for semiconductor manufacturers.
Key Features
1. Exceptional High-Temperature Resistance
With a melting point exceeding 2700°C, SiC materials are inherently stable under extreme heat. Silicon impregnation further enhances their thermal stability, allowing them to withstand prolonged exposure to high temperatures without structural weakening or performance degradation.
2. Superior Thermal Conductivity
The exceptional thermal conductivity of silicon-impregnated SiC ensures uniform heat distribution, reducing thermal stress during critical processing stages. This property prolongs equipment lifespan and minimizes production downtime, making it ideal for high-temperature thermal processing.
3. Oxidation and Corrosion Resistance
A robust silicon oxide layer forms naturally on the surface, providing outstanding resistance to oxidation and corrosion. This ensures long-term reliability in harsh operating environments, protecting both the material and surrounding components.
4. High Mechanical Strength and Wear Resistance
Silicon-impregnated SiC features excellent compressive strength and wear resistance, maintaining its structural integrity under high-load, high-temperature conditions. This reduces the risk of wear-related damage, ensuring consistent performance over extended usage cycles.
Specifications
|
Product Name |
SC-RSiC-Si |
|
Material |
Silicon Impregnation Silicon Carbide Compact (high purity) |
|
Applications |
Semiconductor Heat Treatment Parts, Semiconductor Manufacturing Equipment Parts |
|
Delivery form |
Molded body (Sintered body) |
| Composition | Mechanical Property | Young's Modulus (GPa) |
Bending Strength (MPa) |
||
| Composition (vol%) | α-SiC | α-SiC | RT | 370 | 250 |
| 82 | 18 | 800°C | 360 | 220 | |
| Bulk Density (kg/m³) | 3.02 x 103 | 1200°C | 340 | 220 | |
| Heatproof Temperature°C | 1350 | Poisson's Ratio | 0.18(RT) | ||
| Thermal Property |
Thermal Conductivity (W/(m· K)) |
Specific Heat Capacity (kJ/(kg·K)) |
Coefficient of Thermal Expansion (1/K) |
||
| RT | 220 | 0.7 | RT~700°C | 3.4 x 10-6 | |
| 700°C | 60 | 1.23 | 700~1200°C | 4.3 x10-6 | |
| Impurity Content ((ppm) | |||||||||||||
|
Element |
Fe | Ni | Na | K | Mg | Ca | Cr |
Mn |
Zn | Cu | Ti | Va | Ai |
| Content Rate | 3 | <2 | <0.5 | <0.1 | <1 | 5 | 0.3 | <0.1 | <0.1 | <0.1 | <0.3 | <0.3 | 25 |
Applications
▪ Semiconductor Thermal Processing: Ideal for processes such as chemical vapor deposition (CVD), epitaxial growth, and annealing, where precise temperature control and material durability are critical.
▪ Wafer Carriers & Paddles: Designed to securely hold and transport wafers during high-temperature thermal treatments.
▪ Extreme Operating Environments: Suitable for settings requiring resistance to heat, chemical exposure, and mechanical stress.
Advantages of Silicon-Impregnated SiC
The combination of high-purity silicon carbide and advanced silicon impregnation technology delivers unparalleled performance benefits:
▪ Precision: Enhances the accuracy and control of semiconductor processing.
▪ Stability: Withstands harsh environments without compromising functionality.
▪ Longevity: Extends the service life of semiconductor manufacturing equipment.
▪ Efficiency: Improves productivity by ensuring reliable and consistent results.
Why Choose Our Silicon-Impregnated SiC Solutions?
At Semicera, we specialize in providing high-performance solutions tailored to the needs of semiconductor manufacturers. Our Silicon-Impregnated Silicon Carbide Paddle and Wafer Carrier undergo rigorous testing and quality assurance to meet industry standards. By choosing Semicera, you gain access to cutting-edge materials designed to optimize your manufacturing processes and enhance your production capabilities.
Technical Specifications
▪ Material Composition: High-purity silicon carbide with silicon impregnation.
▪ Operating Temperature Range: Up to 2700°C.
▪ Thermal Conductivity: Exceptionally high for uniform heat distribution.
▪ Resistance Properties: Oxidation, corrosion, and wear-resistant.
▪ Applications: Compatible with various semiconductor thermal processing systems.
Contact Us
Ready to elevate your semiconductor manufacturing process? Contact Semicera today to learn more about our Silicon-Impregnated Silicon Carbide Paddle and Wafer Carrier.
▪ Email: sales01@semi-cera.com/sales05@semi-cera.com
▪ Phone: +86-0574-8650 3783
▪ Location: No.1958 Jiangnan Road, Ningbo High tech, Zone, Zhejiang Province, 315201, China
