Silicon carbide vacuum chuck is a key component used in semiconductor manufacturing and precision industrial applications for grabbing, handling and positioning thin and fragile workpieces such as wafers, glass substrates and optical components. It uses vacuum force to create negative pressure, allowing it to firmly adhere to the surface of the workpiece and release when needed. Silicon carbide vacuum chucks are widely used in semiconductor manufacturing, flat panel displays, optical manufacturing and other precision industrial fields. They can be used for operations such as wafer loading and transfer, substrate alignment, glass plate grabbing and handling, providing high-precision, high-stability and safe workpiece handling solutions.
The characteristics of silicon carbide vacuum chucks are as follows:
1. High temperature resistance: Silicon carbide has excellent high temperature stability and can operate for a long time in a high temperature environment without damage, which is suitable for processes that require high temperature processing.
2. High hardness and wear resistance: Silicon carbide has high hardness and can resist friction and wear, increasing the durability and life of the chuck.
3. Excellent chemical inertness: Silicon carbide has high resistance to a variety of chemicals and solvents and can work stably in chemical environments.
4. High vacuum sealing: Silicon carbide vacuum suction cups can provide reliable vacuum sealing, ensuring stable adsorption force and safe grasping of workpieces.
We are able to design and manufacture according to your specific dimensions with good quality and reasonable deliver time.
Advantages
High temperature oxidation resistance
Excellent Corrosion resistance
Good Abrasion resistance
High coefficient of heat conductivity
Self-lubricity, low density
High hardness
Customized design.
Applications
-Wear-resistant Field: bushing, plate, sandblasting nozzle,cyclone lining, grinding barrel,etc...
-High Temperature Field: siC Slab, Quenching Furnace Tube,Radiant Tube,crucible,Heating Element, Roller, Beam, Heat Exchanger, Cold Air Pipe, Burner Nozzle, Thermocouple Protection Tube, SiC boat,Kiln car Structure,Setter,etc.
-Military Bulletproof Field
-Silicon Carbide Semiconductor: SiC wafer boat, sic chuck,sic paddle, sic cassette, sic diffusion tube, wafer fork, suction plate, guideway,etc.
-Silicon Carbide Seal Field: all kinds of sealing ring, bearing, bushing, etc.
-Photovoltaic Field: Cantilever Paddle, Grinding Barrel, Silicon Carbide Roller,etc.
-Lithium Battery Field
