Description
Silicon Carbide Epitaxial Wafer Discs for VEECO Equipment from semicera are precision-engineered for advanced epitaxial processes, ensuring high-quality results in both Si Epitaxy and SiC Epitaxy applications. These wafer discs are specifically designed for VEECO equipment, enhancing the performance and efficiency of various semiconductor manufacturing processes. Semicera's expertise guarantees exceptional durability and precision for critical applications.
These epitaxial wafer discs are ideal for use with MOCVD Susceptor systems, providing robust support for essential components such as PSS Etching Carrier, ICP Etching Carrier, and RTP Carrier. Additionally, they offer enhanced compatibility with LED Epitaxial Susceptor, Barrel Susceptor, and Monocrystalline Silicon processes, ensuring that your production lines maintain the highest standards of efficiency and accuracy.
Designed for cutting-edge technology, these wafer discs contribute significantly to the production of Photovoltaic Parts and facilitate complex processes like GaN on SiC Epitaxy. Whether used for Pancake Susceptor configurations or other demanding applications, semicera's Silicon Carbide Epitaxial Wafer Discs provide a reliable foundation for advanced semiconductor manufacturing, ensuring optimal performance and long-term durability.
Main Features
1 .High purity SiC coated graphite
2. Superior heat resistance & thermal uniformity
3. Fine SiC crystal coated for a smooth surface
4. High durability against chemical cleaning
Main Specifications of CVD-SIC Coatings:
SiC-CVD | ||
Density | (g/cc) | 3.21 |
Flexural strength | (Mpa) | 470 |
Thermal expansion | (10-6/K) | 4 |
Thermal conductivity | (W/mK) | 300 |
Packing and Shipping
Supply Ability:
10000 Piece/Pieces per Month
Packaging & Delivery:
Packing:Standard & Strong Packing
Poly bag + Box + Carton + Pallet
Port:
Ningbo/Shenzhen/Shanghai
Lead Time:
Quantity(Pieces) |
1-1000 |
>1000 |
Est. Time(days) | 30 | To be negotiated |