SiC plate is a kind of 0 porosity dense body ceramics, which is based on SiC and sintered at 2250 ℃. SiC content is more than 99.6%, bending strength is more than 410mpa and thermal conductivity is 140W / M.K. it is the only ceramic material resistant to HF, H2SO4 and other strong acid corrosion。
Advantages of silicon carbide ceramics:
1, the coefficient of thermal expansion is small, very close to silicon;
2, excellent wear resistance, hardness second only to diamond;
3, excellent thermal conductivity, high temperature resistance and fast heat dissipation;
![Silicon carbide chuck3](http://www.semi-cera.com/uploads/Silicon-carbide-chuck3.png)
Technical Parameters
![图片1](http://www.semi-cera.com/uploads/15a6ba392.png)