Silicon carbide ceramic chucks

Short Description:

WeiTai Energy Technology Co., Ltd. is a leading supplier of advanced semiconductor ceramics and the only manufacturer in China that can simultaneously provide high-purity silicon carbide ceramic(especially the Recrystallized SiC) and CVD SiC coating. In addition, our company is also committed to ceramic fields such as alumina, aluminum nitride, zirconia, and silicon nitride, etc.


Product Detail

Product Tags

SiC plate is a kind of 0 porosity dense body ceramics, which is based on SiC and sintered at 2250 ℃. SiC content is more than 99.6%, bending strength is more than 410mpa and thermal conductivity is 140W / M.K. it is the only ceramic material resistant to HF, H2SO4 and other strong acid corrosion。

Advantages of silicon carbide ceramics:

1, the coefficient of thermal expansion is small, very close to silicon;

2, excellent wear resistance, hardness second only to diamond;

3, excellent thermal conductivity, high temperature resistance and fast heat dissipation;

Silicon carbide chuck3

Technical Parameters

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