SiC coated graphite heater for MOCVD K465i, epitaxial graphite heater for semiconductor equipment

Short Description:

Semicera Energy Technology Co., Ltd. is a leading supplier specializing in wafer and advanced semiconductor consumables. We are dedicated to providing high-quality, reliable, and innovative products to semiconductor manufacturing, photovoltaic industry and other related fields.

Our product line includes SiC/TaC coated graphite products and ceramic products, encompassing various materials such as silicon carbide, silicon nitride, and aluminum oxide and etc.

As a trusted supplier, we understand the importance of consumables in the manufacturing process, and we are committed to delivering products that meet the highest quality standards to fulfill our customers’ needs.

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Product Detail

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Main features of graphite heater:

1. uniformity of heating structure.

2. good electrical conductivity and high electrical load.

3. corrosion resistance.

4. inoxidizability.

5. high chemical purity.

6. high mechanical strength.

The advantage is energy efficient, high value and low maintenance. We can produce anti-oxidation and long life span graphite crucible, graphite mold and all parts of graphite heater.

Main parameters of graphite heater

Technical Specification	VET-M3
Bulk Density (g/cm3)	≥1.85
Ash Content (PPM)	≤500
Shore Hardness	≥45
Specific Resistance (μ.Ω.m)	≤12
Flexural Strength (Mpa)	≥40
Compressive Strength (Mpa)	≥70
Max. Grain Size (μm)	≤43
Coefficient of Thermal Expansion Mm/°C	≤4.4*10-6