SiC Coated Deep UV LED Susceptor – Advanced MOCVD Component for High-Performance Epitaxy
Overview: The SiC Coated Deep UV LED Susceptor is a critical component in MOCVD (Metal-Organic Chemical Vapor Deposition) processes, specifically designed to support efficient and stable deep UV LED epitaxial layer growth. At Semicera, we are a leading manufacturer and supplier of SiC coated susceptors, offering products that meet the highest industry standards. With years of experience and long-term partnerships with top LED epitaxial manufacturers, our susceptor solutions are trusted globally.
Key Features & Benefits:
▪ Optimized for Deep UV LED Epitaxy: Specially designed for high-performance epitaxial growth of deep UV LEDs, including those in the <260nm wavelength range (used in UV-C disinfection, sterilization, and other applications).
▪ Material & Coating: Manufactured from high-quality SGL graphite, coated with CVD SiC, ensuring excellent resistance to NH3, HCl, and high-temperature environments. This durable coating enhances performance and longevity.
▪ Precision Thermal Management: Advanced processing techniques ensure uniform heat distribution, preventing temperature gradients that could impact epitaxial layer growth, improving uniformity, and material quality.
▪ Thermal Expansion Compatibility: Matches the thermal expansion coefficient of AlN/GaN epitaxial wafers, minimizing the risk of wafer warping or cracking during the MOCVD process.
Adaptable to Leading MOCVD Equipment: Compatible with major MOCVD systems such as Veeco K465i, EPIK 700, and Aixtron Crius, supporting wafer sizes from 2 to 8 inches and offering customized solutions for slot design, process temperature, and other parameters.
Applications:
▪ Deep UV LED Manufacturing: Ideal for the epitaxy of deep UV LEDs used in applications like UV-C disinfection and sterilization.
▪ Nitride Semiconductor Epitaxy: Suitable for GaN and AlN epitaxial processes in semiconductor device manufacturing.
▪ Research & Development: Supporting advanced epitaxy experiments for universities and research institutions focused on deep UV materials and new technologies.
Why Choose Semicera?
▪ Proven Quality: Our SiC coated deep UV LED susceptors undergo rigorous verification to ensure they match the performance of top international manufacturers.
▪ Tailored Solutions: We offer customized products to meet the unique needs of our customers, ensuring optimal performance and long-term reliability.
▪ Global Expertise: As a trusted partner of many LED epitaxial manufacturers worldwide, Semicera brings cutting-edge technology and a wealth of experience to every project.
Contact Us Today! Discover how Semicera can support your MOCVD processes with high-quality, reliable SiC coated deep UV LED susceptors. Contact us for more information or to request a quote.
