SiC Ceramic Seal Part

Short Description:

Semicera’s SiC Ceramic Seal Part is designed for the semiconductor manufacturing industry, providing excellent sealing performance and durability. It uses high-quality Silicon Carbide (SiC) material, combined with Alumina (Al2O3) and Silicon Nitride (Si3N4), to ensure reliable performance in high temperature and harsh environments, and is widely used in wafer boats and wafer carriers.

 


Product Detail

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Why is Silicon Carbide coating?

Semicera's self-developed SiC Ceramic Seal Part is designed to meet the high standards of modern semiconductor manufacturing. This sealing part uses high-performance silicon carbide (SiC) material with excellent wear resistance and chemical stability to ensure excellent sealing performance in extreme environments. Combined with aluminum oxide (Al2O3) and silicon nitride (Si3N4), this part performs well in high-temperature applications and can effectively prevent gas and liquid leakage.

When used in conjunction with equipment such as wafer boats and wafer carriers, Semicera's SiC Ceramic Seal Part can significantly improve the efficiency and reliability of the overall system. Its superior temperature resistance and corrosion resistance make it an indispensable component in high-precision semiconductor manufacturing, ensuring stability and safety during the production process.

In addition, the design of this sealing part has been carefully optimized to ensure compatibility with a variety of equipment, making it easy to use in different production lines. Semicera's R&D team continues to work hard to promote technological innovation to ensure the competitiveness of its products in the industry.

Choosing Semicera's SiC Ceramic Seal Part, you will get a combination of high performance and reliability, helping you achieve more efficient production processes and excellent product quality. Semicera is always committed to providing customers with the best semiconductor solutions and services to promote the continuous development and progress of the industry.

Our advantage, why choose Semicera?

✓Top-quality in China market

 

✓Good service always for you, 7*24 hours

 

✓Short date of delivery

 

✓Small MOQ welcome and accepted

 

✓Custom services

quartz production equipment 4

Application

Epitaxy Growth Susceptor

Silicon/silicon carbide wafers need to go through multiple processes to be used in electronic devices. An important process is silicon/sic epitaxy, in which silicon/sic wafers are carried on a graphite base. Special advantages of Semicera's silicon carbide-coated graphite base include extremely high purity, uniform coating, and extremely long service life. They also have high chemical resistance and thermal stability.

 

LED Chip Production

During the extensive coating of the MOCVD reactor, the planetary base or carrier moves the substrate wafer. The performance of the base material has a great influence on the coating quality, which in turn affects the scrap rate of the chip. Semicera's silicon carbide-coated base increases the manufacturing efficiency of high-quality LED wafers and minimizes wavelength deviation. We also supply additional graphite components for all MOCVD reactors currently in use. We can coat almost any component with a silicon carbide coating, even if the component diameter is up to 1.5M, we can still coat with silicon carbide.

Semiconductor Field, Oxidation Diffusion Process, Etc.

In the semiconductor process, the oxidation expansion process requires high product purity, and at Semicera we offer custom and CVD coating services for the majority of silicon carbide parts.

The following picture shows the rough-processed silicon carbide slurry of Semicea and the silicon carbide furnace tube that is cleaned in the 1000-level dust-free room. Our workers are working before coating. The purity of our silicon carbide can reach 99.99%, and the purity of sic coating is greater than 99.99995%.

Silicon carbide semi-finished product before coating -2

Raw Silicon Carbide Paddle and SiC Process Tube in Cleaing

SiC Tube

Silicon Carbide Wafer Boat CVD SiC Coated

Data of Semi-cera' CVD SiC Performace.

Semi-cera CVD SiC coating data
Purity of sic
Semicera Work place
Semicera work place 2
Semicera Ware House
Equipment machine
CNN processing, chemical cleaning, CVD coating
Our service

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