Semiconductor silicon carbide wafer boat

Short Description:

Weitai SiC component products have high oxidation resistance, chemical stability and heat resistance, with excellent characteristics of stability even at 2000 degrees. They are widely used in wafer boats, tubes and simulation wafers that replace silicon wafers required in the manufacturing process of semiconductor materials, and are also widely used in fixture products used at high temperatures. It is widely used in semiconductor production equipment, automotive field, energy field and other fields.


Product Detail

Product Tags

Silicon carbide is a new type of ceramics with high cost performance and excellent material properties. Due to features like high strength and hardness, high temperature resistance, great thermal conductivity and chemical corrosion resistance, Silicon Carbide can almost withstand all chemical medium. Therefore, SiC are widely used in oil mining, chemical, machinery and airspace, even nuclear energy and the military have their special demands on SIC. Some normal application we can offer are seal rings for pump, valve and protective armor etc.

We are able to design and manufacture according to your specific dimensions with good quality and reasonable deliver time. 

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Advantages:

High temperature oxidation resistance

Excellent Corrosion resistance

Good Abrasion resistance

High coefficient of heat conductivity
Self-lubricity, low density
High hardness
Customized design.

 

Applications:

-Wear-resistant Field: bushing, plate, sandblasting nozzle,cyclone lining, grinding barrel,etc...

-High Temperature Field: siC Slab, Quenching Furnace Tube,Radiant Tube,crucible,Heating Element, Roller, Beam, Heat Exchanger, Cold Air Pipe, Burner Nozzle, Thermocouple Protection Tube, SiC boat,Kiln car Structure,Setter,etc.

-Military Bulletproof Field

-Silicon Carbide Semiconductor: SiC wafer boat, sic chuck,sic paddle, sic cassette, sic diffusion tube, wafer fork, suction plate, guideway,etc.

-Silicon Carbide Seal Field: all kinds of sealing ring, bearing, bushing, etc.

-Photovoltaic Field: Cantilever Paddle, Grinding Barrel, Silicon Carbide Roller,etc.

-Lithium Battery Field

Technical Parameters:

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Material Datasheet

材料Material

R-SiC

使用温度Working temperature (°C)

1600°C ( 氧化气氛Oxidizing environment)

1700°C ( 还原气氛Reducing environment)

SiC含量SiC content (%)

> 99

自由Si 含量Free Si content (%)

< 0.1

体积密度Bulk density (g/cm3)

2.60-2.70

气孔率Apparent porosity (%)

< 16

抗压强度Crushing strength (MPa)

> 600

常温抗弯强度Cold bending strength (MPa)

80-90 (20°C)

高温抗弯强度Hot bending strength (MPa)

90-100 (1400°C)

热膨胀系数

Thermal expansion coefficient @1500°C (10-6/°C)

4.70

导热系数Thermal conductivity @1200°C (W/mK)

23

杨氏模量Elastic modulus (GPa)

240

抗热震性Thermal shock resistance

很好Extremely good

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