RTP CVD SiC rings are widely used in industrial and scientific fields in high temperature and corrosive environments. It plays an important role in semiconductor manufacturing, optoelectronics, precision machinery and chemical industry. Specific applications include:
1. Semiconductor manufacturing: RTP CVD SiC rings can be used for heating and cooling of semiconductor equipment, providing stable temperature control and ensuring the accuracy and consistency of the process.
2. Optoelectronics: Due to its excellent thermal conductivity and high temperature resistance, RTP CVD SiC rings can be used as support and heat dissipation materials for lasers, fiber optic communication equipment and optical components.
3. Precision machinery: RTP CVD SiC rings can be used for precision instruments and equipment in high temperature and corrosive environments, such as high temperature furnaces, vacuum devices and chemical reactors.
4. Chemical industry: Due to its corrosion resistance and chemical stability, RTP CVD SiC rings can be used in containers, pipes and reactors in chemical reactions and catalytic processes.
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Epitaxy Growth Susceptor
Silicon/silicon carbide wafers need to go through multiple processes to be used in electronic devices. An important process is silicon/sic epitaxy, in which silicon/sic wafers are carried on a graphite base. Special advantages of Semicera's silicon carbide-coated graphite base include extremely high purity, uniform coating, and extremely long service life. They also have high chemical resistance and thermal stability.
LED Chip Production
During the extensive coating of the MOCVD reactor, the planetary base or carrier moves the substrate wafer. The performance of the base material has a great influence on the coating quality, which in turn affects the scrap rate of the chip. Semicera's silicon carbide-coated base increases the manufacturing efficiency of high-quality LED wafers and minimizes wavelength deviation. We also supply additional graphite components for all MOCVD reactors currently in use. We can coat almost any component with a silicon carbide coating, even if the component diameter is up to 1.5M, we can still coat with silicon carbide.
Semiconductor Field, Oxidation Diffusion Process, Etc.
In the semiconductor process, the oxidation expansion process requires high product purity, and at Semicera we offer custom and CVD coating services for the majority of silicon carbide parts.
The following picture shows the rough-processed silicon carbide slurry of Semicea and the silicon carbide furnace tube that is cleaned in the 1000-level dust-free room. Our workers are working before coating. The purity of our silicon carbide can reach 99.99%, and the purity of sic coating is greater than 99.99995%.
Raw Silicon Carbide Paddle and SiC Process Tube in Cleaing
Silicon Carbide Wafer Boat CVD SiC Coated
