Introduction of wafer carrier
PRODUCT CATAGORY
▶ Wafer Carrier System for PECVD & TALOX Process
• PECVD & TALOX Graphite Boat (M4~M12)
• Vertical SM-Boat (M4, M6)
• Implant & shower Graphite Part (M4~M6)
• C/C Tray & Ceramic Coating
• Metal RIE-Tray & Ceramic Coating
• Vacuum Sealing : O-Ring & SQ-Ring
▶ Texturing & Wet Etching Transfer Process
• LSC H-Carrier or cassette (M4~M12)
• LSC V-Carrier or cassette (M4~M12)
• ASC Carrier or cassette (M4, M6)
• W/F Carrier & Storage Box (M4~M12)
• Transport Wheel (Roller) Series
▶ Solar Cell Carrier & Metal Carrier
• TRC Carrier or cassette (M4~M12)
• Magazine (with BELT)
GRAPHITE BOAT (H-Type)
19P6-216CT (WF M4~M12)
GRAPHITE BOAT (H-Type)
21P6-240CT WF M4~M12)
GRAPHITE BOAT (H-Type)
23P7-308CT(W/F M4~M12)
GRAPHITE BOAT (H-Type)
22P/7-294TP (W/F M4~M12)
GRAPHITE BOAT (H-Type)
W182-22P7-294CT (W/F M12)
W182-21P6-240CT (W/F M12)
WF CARRIER & STORAGE BOX (~M12)
C/C TRAY or CARRIER( M4~M10)
C/C TRAY or CARRIER( M4~M10)
VERTICAL BOAT (SM) M6
LSC-H-CARRIER(~M12)
LSC-V-CARRIER(~M12)
ASC CARRIER (~M6)
TRC CARRIER(~M12)
TRC CARRIER(~M12)
GRAPHITE-BOAT(M12)
Wafer Carrier System for PECVD Process
▶ GRAPHITE BOAT (CT-Designed) M10/M12 Process
• SPECIAL DESIGN CONCEPT
▶ GRAPHITE BOAT (CT-Designed) M4/M6 Process
▶ BOAT Accessory Parts
▶ VERTICAL BOAT-161.7mm WAFER
▶ VERTICAL BOAT-166mm WAFER
▶ VERTICAL BOAT-161.7mm, 166mm WAFER
Solar Cell Carrier & Metal TRC Carrier
TYPE : Automation
WAFER SIZE : ① 156×156MM ② 156.75×156.75MM
③161.7x161.7MM ④166x166MM
⑤ 180×180mm ⑥ 210×210mm
USAGE : Carry (Cassette)
CAPACITY : 100 sheet
PITCH : 4.76MM/5.953mm/6.35mm
DIMENSION : Approx 559×220×220MM
Approx 712×260×260MM
ADVANTAGE : Atmosphere
MATERIAL : FLAME,SIDE BAR-Aluminum (anodizing)
SIDE PLATE-POM (Antistatic)
Cover of bottom bar-EPDM/PU/VITON (ASE)
TRC-METAL CARRIER (U’SER LINE)
TRC-METAL CARRIER (U’SER LINE)
TRC-METAL CARRIER (U’SER LINE)
SHOWER PLATE & IMPLANT, CARRIER
