Long-life SiC Coated Graphite Heater for MOCVD K465i, Graphite Heater for epitaxy

Short Description:

The graphite heater components are used in the high temperature furnace with temperature reached 2200 degrees at vacuum environment and 3000 degrees in the deoxidized and inserted gas environment.


Product Detail

Product Tags

Description

The graphite heater components are used in the high temperature furnace with temperature reached 2200 degrees at vacuum environment and 3000 degrees in the deoxidized and inserted gas environment.

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Main Features

1. uniformity of heating structure.
2. good electrical conductivity and high electrical load.
3. corrosion resistance.
4. inoxidizability.
5. high chemical purity.
6. high mechanical strength.
The advantage is energy efficient, high value and low maintenance.
We can produce anti-oxidation and long life span graphite crucible, graphite mold and all parts of graphite heater.

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Main parameters of graphite heater

Technical Specification

VET-M3

Bulk Density (g/cm3)

≥1.85

Ash Content (PPM)

≤500

Shore Hardness

≥45

Specific Resistance (μ.Ω.m)

≤12

Flexural Strength (Mpa)

≥40

Compressive Strength (Mpa)

≥70

Max. Grain Size (μm)

≤43

Coefficient of Thermal Expansion Mm/°C

≤4.4*10-6

Graphite heater for electric furnace has properties of heat resistance, oxidation resistance, good electrical conductivity and better mechanical intensity. We can machine various types of graphite heater according to customers' designs.

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