High temperature and corrosion resistant wafer boat box

Short Description:

WeiTai Energy Technology Co., Ltd. is a leading supplier specializing in wafer and advanced semiconductor consumables. We are dedicated to providing high-quality, reliable, and innovative products to semiconductor manufacturing, photovoltaic industry and other related fields.

Our product line includes SiC/TaC coated graphite products and ceramic products, encompassing various materials such as silicon carbide, silicon nitride, and aluminum oxide and etc.

As a trusted supplier, we understand the importance of consumables in the manufacturing process, and we are committed to delivering products that meet the highest quality standards to fulfill our customers’ needs. 


Product Detail

Product Tags

Silicon carbide is a new type of ceramics with high cost performance and excellent material properties. Due to features like high strength and hardness, high temperature resistance, great thermal conductivity and chemical corrosion resistance, Silicon Carbide can almost withstand all chemical medium. Therefore, SiC are widely used in oil mining, chemical, machinery and airspace, even nuclear energy and the military have their special demands on SIC. Some normal application we can offer are seal rings for pump, valve and protective armor etc.

We are able to design and manufacture according to your specific dimensions with good quality and reasonable deliver time. 

微信图片_20230719092847

Advantages:

High temperature oxidation resistance

Excellent Corrosion resistance

Good Abrasion resistance

High coefficient of heat conductivity
Self-lubricity, low density
High hardness
Customized design.

 

Applications:

-Wear-resistant Field: bushing, plate, sandblasting nozzle,cyclone lining, grinding barrel,etc...

-High Temperature Field: siC Slab, Quenching Furnace Tube,Radiant Tube,crucible,Heating Element, Roller, Beam, Heat Exchanger, Cold Air Pipe, Burner Nozzle, Thermocouple Protection Tube, SiC boat,Kiln car Structure,Setter,etc.

-Military Bulletproof Field

-Silicon Carbide Semiconductor: SiC wafer boat, sic chuck,sic paddle, sic cassette, sic diffusion tube, wafer fork, suction plate, guideway,etc.

-Silicon Carbide Seal Field: all kinds of sealing ring, bearing, bushing, etc.

-Photovoltaic Field: Cantilever Paddle, Grinding Barrel, Silicon Carbide Roller,etc.

-Lithium Battery Field

Silicon carbide crystal boat (3)

Technical Parameters:

图片2

Material Datasheet

材料Material

R-SiC

使用温度Working temperature (°C)

1600°C ( 氧化气氛Oxidizing environment)

1700°C ( 还原气氛Reducing environment)

SiC含量SiC content (%)

> 99

自由Si 含量Free Si content (%)

< 0.1

体积密度Bulk density (g/cm3)

2.60-2.70

气孔率Apparent porosity (%)

< 16

抗压强度Crushing strength (MPa)

> 600

常温抗弯强度Cold bending strength (MPa)

80-90 (20°C)

高温抗弯强度Hot bending strength (MPa)

90-100 (1400°C)

热膨胀系数

Thermal expansion coefficient @1500°C (10-6/°C)

4.70

导热系数Thermal conductivity @1200°C (W/mK)

23

杨氏模量Elastic modulus (GPa)

240

抗热震性Thermal shock resistance

很好Extremely good


  • Previous:
  • Next: