Semicera presents high-quality custom silicon carbide cantilever paddles crafted to elevate semiconductor manufacturing processes. The innovative SiC paddle design ensures exceptional durability and high thermal resistance, making it an essential component for wafer handling in challenging high-temperature environments.
The Silicon carbide paddle is built to withstand extreme thermal cycles while maintaining structural integrity, ensuring reliable wafer transportation during critical phases of semiconductor production. With superior mechanical strength, this wafer boat minimizes the risk of damage to wafers, leading to higher yields and consistent production quality.
One of the key innovations in Semicera's SiC paddle lies in its custom design options. Tailored to meet specific production needs, the paddle offers flexibility in integration with various equipment setups, making it an ideal solution for modern fabrication processes. The lightweight yet robust construction enables easy handling and reduces operational downtime, contributing to improved efficiency in semiconductor production.
In addition to its thermal and mechanical properties, the Silicon carbide paddle offers excellent chemical resistance, allowing it to perform reliably even in harsh chemical environments. This makes it particularly suitable for use in processes involving etching, deposition, and high-temperature treatment, where maintaining the integrity of the wafer boat is crucial for ensuring high-quality outputs.
Physical properties of Recrystallized Silicon Carbide |
|
Property |
Typical Value |
Working temperature (°C) |
1600°C (with oxygen), 1700°C (reducing environment) |
SiC content |
> 99.96% |
Free Si content |
< 0.1% |
Bulk density |
2.60-2.70 g/cm3 |
Apparent porosity |
< 16% |
Compression strength |
> 600 MPa |
Cold bending strength |
80-90 MPa (20°C) |
Hot bending strength |
90-100 MPa (1400°C) |
Thermal expansion @1500°C |
4.70 10-6/°C |
Thermal conductivity @1200°C |
23 W/m•K |
Elastic modulus |
240 GPa |
Thermal shock resistance |
Extremely good |