High Purity Silicon Carbide Paddle

Short Description:

Semicera High Purity Silicon Carbide Paddle is designed for advanced semiconductor applications, providing superior thermal stability and mechanical strength. This SiC Paddle ensures precise wafer handling, making it an ideal choice for high-temperature environments. Contact us for inquiries!


Product Detail

Product Tags

Semicera High Purity Silicon Carbide Paddle is meticulously engineered to meet the stringent demands of modern semiconductor manufacturing processes. This SiC Cantilever Paddle excels in high-temperature environments, offering unparalleled thermal stability and mechanical durability. The SiC Cantilever structure is built to withstand extreme conditions, ensuring reliable wafer handling throughout various processes.

One of the key innovations of the SiC Paddle is its lightweight yet robust design, which allows for easy integration into existing systems. Its high thermal conductivity helps maintain wafer stability during critical phases such as etching and deposition, minimizing the risk of wafer damage and ensuring higher production yields. The use of high-density silicon carbide in the paddle construction enhances its resistance to wear and tear, providing extended operational life and reducing the need for frequent replacements.

Semicera places a strong emphasis on innovation, delivering a SiC Cantilever Paddle that not only meets but exceeds industry standards. This paddle is optimized for use in various semiconductor applications, from deposition to etching, where precision and reliability are crucial. By integrating this cutting-edge technology, manufacturers can expect improved efficiency, reduced maintenance costs, and consistent product quality.

Physical properties of Recrystallized Silicon Carbide

Property

Typical Value

Working temperature (°C)

1600°C (with oxygen), 1700°C (reducing environment)

SiC content

> 99.96%

Free Si content

< 0.1%

Bulk density

2.60-2.70 g/cm3

Apparent porosity

< 16%

Compression strength

> 600 MPa

Cold bending strength

80-90 MPa (20°C)

Hot bending strength

90-100 MPa (1400°C)

Thermal expansion @1500°C

4.70 10-6/°C

Thermal conductivity @1200°C

23  W/m•K

Elastic modulus

240 GPa

Thermal shock resistance

Extremely good

0f75f96b9a8d9016a504c0c47e59375
Semicera Work place
Semicera work place 2
Equipment machine
CNN processing, chemical cleaning, CVD coating
Semicera Ware House
Our service

  • Previous:
  • Next: