Description
The Graphite Susceptor with Silicon Carbide Coating, 6 pieces 6 inch wafer Carrier from semicera offers exceptional durability and thermal conductivity for high-performance epitaxial growth applications. Semicera specializes in advanced susceptors designed to enhance processes like Si Epitaxy and SiC Epitaxy, ensuring reliable performance in demanding semiconductor environments.
This susceptor is specifically engineered for use with MOCVD Susceptor systems and offers compatibility with various carriers such as the PSS Etching Carrier, ICP Etching Carrier, and RTP Carrier. It is ideal for Monocrystalline Silicon production and LED Epitaxial Susceptor setups, offering versatility in different configurations, including Barrel Susceptor and Pancake Susceptor designs.
The Graphite Susceptor with Silicon Carbide Coating also supports applications in the solar energy sector through its integration with Photovoltaic Parts and excels in GaN on SiC Epitaxy processes. Its 6-inch wafer carrier capacity ensures high throughput, making it an essential tool for manufacturers in semiconductor and photovoltaic industries.
Main Features
1 .High purity SiC coated graphite
2. Superior heat resistance & thermal uniformity
3. Fine SiC crystal coated for a smooth surface
4. High durability against chemical cleaning
Main Specifications of CVD-SIC Coatings:
SiC-CVD | ||
Density | (g/cc) | 3.21 |
Flexural strength | (Mpa) | 470 |
Thermal expansion | (10-6/K) | 4 |
Thermal conductivity | (W/mK) | 300 |
Packing and Shipping
Supply Ability:
10000 Piece/Pieces per Month
Packaging & Delivery:
Packing:Standard & Strong Packing
Poly bag + Box + Carton + Pallet
Port:
Ningbo/Shenzhen/Shanghai
Lead Time:
Quantity(Pieces) |
1-1000 |
>1000 |
Est. Time(days) | 30 | To be negotiated |