Graphite Susceptor with Silicon Carbide Coating, 6 pieces 6 inch wafer Carrier

Short Description:

Semicera Energy offers a comprehensive range of susceptors and graphite components designed for various epitaxy reactors.

Through strategic partnerships with industry-leading OEMs, extensive materials expertise, and advanced manufacturing capabilities, Semicera Energy delivers tailored designs to meet the specific requirements of your application. Our commitment to excellence ensures that you receive optimal solutions for your epitaxy reactor needs.


Product Detail

Product Tags

Description

The Graphite Susceptor with Silicon Carbide Coating, 6 pieces 6 inch wafer Carrier from semicera offers exceptional durability and thermal conductivity for high-performance epitaxial growth applications. Semicera specializes in advanced susceptors designed to enhance processes like Si Epitaxy and SiC Epitaxy, ensuring reliable performance in demanding semiconductor environments.

This susceptor is specifically engineered for use with MOCVD Susceptor systems and offers compatibility with various carriers such as the PSS Etching Carrier, ICP Etching Carrier, and RTP Carrier. It is ideal for Monocrystalline Silicon production and LED Epitaxial Susceptor setups, offering versatility in different configurations, including Barrel Susceptor and Pancake Susceptor designs.

The Graphite Susceptor with Silicon Carbide Coating also supports applications in the solar energy sector through its integration with Photovoltaic Parts and excels in GaN on SiC Epitaxy processes. Its 6-inch wafer carrier capacity ensures high throughput, making it an essential tool for manufacturers in semiconductor and photovoltaic industries.

 

Main Features

1 .High purity SiC coated graphite

2. Superior heat resistance & thermal uniformity

3. Fine SiC crystal coated for a smooth surface

4. High durability against chemical cleaning

 

Main Specifications of CVD-SIC Coatings:

SiC-CVD
Density (g/cc) 3.21
Flexural strength (Mpa) 470
Thermal expansion (10-6/K) 4
Thermal conductivity (W/mK) 300

Packing and Shipping

Supply Ability:
10000 Piece/Pieces per Month
Packaging & Delivery:
Packing:Standard & Strong Packing
Poly bag + Box + Carton + Pallet
Port:
Ningbo/Shenzhen/Shanghai
Lead Time:

Quantity(Pieces)

1-1000

>1000

 Est. Time(days) 30 To be negotiated
Semicera Work place
Semicera work place 2
Equipment machine
CNN processing, chemical cleaning, CVD coating
Semicera Ware House
Our service

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