Custom SiC coated graphite heaters for semiconductor wafers

Short Description:

WeiTai Energy Technology Co., Ltd. is a leading supplier of advanced semiconductor ceramics and the only manufacturer in China that can simultaneously provide high-purity silicon carbide ceramic(especially the Recrystallized SiC) and CVD SiC coating. In addition, our company is also committed to ceramic fields such as alumina, aluminum nitride, zirconia, and silicon nitride, etc.

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Main features of graphite heater:

1. uniformity of heating structure.

2. good electrical conductivity and high electrical load.

3. corrosion resistance.

4. inoxidizability.

5. high chemical purity.

6. high mechanical strength.

The advantage is energy efficient, high value and low maintenance. We can produce anti-oxidation and long life span graphite crucible, graphite mold and all parts of graphite heater.

Main parameters of graphite heater

Technical Specification	Semicera-M3
Bulk Density (g/cm3)	≥1.85
Ash Content (PPM)	≤500
Shore Hardness	≥45
Specific Resistance (μ.Ω.m)	≤12
Flexural Strength (Mpa)	≥40
Compressive Strength (Mpa)	≥70
Max. Grain Size (μm)	≤43
Coefficient of Thermal Expansion Mm/°C	≤4.4*10-6