2~6 inch 4° off-angle P-type 4H-SiC substrate

Short Description:

‌4° off-angle P-type 4H-SiC substrate‌ is a specific semiconductor material, where “4° off-angle” refers to the crystal orientation angle of the wafer being 4 degrees off-angle, and “P-type” refers to the conductivity type of the semiconductor. This material has important applications in the semiconductor industry, especially in the fields of power electronics and high-frequency electronics.


Product Detail

Product Tags

Semicera’s 2~6 inch 4° off-angle P-type 4H-SiC substrates are engineered to meet the growing needs of high-performance power and RF device manufacturers. The 4° off-angle orientation ensures optimized epitaxial growth, making this substrate an ideal foundation for a range of semiconductor devices, including MOSFETs, IGBTs, and diodes.

This 2~6 inch 4° off-angle P-type 4H-SiC substrate has excellent material properties, including high thermal conductivity, excellent electrical performance, and outstanding mechanical stability. The off-angle orientation helps reduce micropipe density and promotes smoother epitaxial layers, which is critical to improving the performance and reliability of the final semiconductor device.

Semicera’s 2~6 inch 4° off-angle P-type 4H-SiC substrates are available in a variety of diameters, ranging from 2 inches to 6 inches, to meet different manufacturing requirements. Our substrates are precisely engineered to provide uniform doping levels and high-quality surface characteristics, ensuring that each wafer meets the stringent specifications required for advanced electronic applications.

Semicera's commitment to innovation and quality ensures that our 2~6 inch 4° off-angle P-type 4H-SiC substrates deliver consistent performance in a wide range of applications from power electronics to high-frequency devices. This product provides a reliable solution for the next generation of energy-efficient, high-performance semiconductors, supporting technological advancements in industries such as automotive, telecommunications, and renewable energy.

Size-related standards

Size

2-Inch

4-Inch

Diameter 50.8 mm±0.38 mm 100.0 mm+0/-0.5 mm
Surface Orentation 4°toward<11-20>±0.5° 4°toward<11-20>±0.5°
Primary Flat Length 16.0 mm±1.5mm 32.5mm±2mm
Secondary Flat Length 8.0 mm±1.5mm 18.0 mm ± 2 mm
Primary Flat Orientation Parallelto <11-20>±5.0° Parallelto<11-20>±5.0c
Secondary Flat Orientation 90°CW from primary ± 5.0°,silicon face up 90°CW from primary ± 5.0°,silicon face up
Surface Finish C-Face: Optical Polish, Si-Face: CMP C-Face:OpticalPolish, Si-Face: CMP
Wafer Edge Beveling Beveling
Surface Roughness Si-Face Ra<0.2 nm Si-Face Ra<0.2nm
Thickness 350.0±25.0um 350.0±25.0um
Polytype 4H 4H
Doping p-Type p-Type

Size-related standards

Size

6-Inch
Diameter 150.0 mm+0/-0.2 mm
Surface Orientation 4°toward<11-20>±0.5°
Primary Flat Length 47.5 mm ± 1.5mm
Secondary Flat Length None
Primary Flat Orientation Parallel to <11-20>±5.0°
SecondaryFlat Orientation 90°CW from primary ± 5.0°, silicon face up
Surface Finish C-Face: Optical Polish, Si-Face:CMP
Wafer Edge Beveling
Surface Roughness Si-Face Ra<0.2 nm
Thickness 350.0±25.0μm
Polytype 4H
Doping p-Type

Raman

2-6 inch 4° off-angle P-type 4H-SiC substrate-3

Rocking curve

2-6 inch 4° off-angle P-type 4H-SiC substrate-4

Dislocation density (KOH etching)

2-6 inch 4° off-angle P-type 4H-SiC substrate-5

KOH etching images

2-6 inch 4° off-angle P-type 4H-SiC substrate-6
SiC wafers

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